| Generation of compact alumina passivation layers on aluminum plasma equipement components DL Sung Je Kim, Laksheswar Kalita, Yogita Pareek, Ankur Kadam, Prerna ... US Patent 9,903,020, 2018 | 206 | 2018 |
| Structural, thermal and spectroscopic properties of supramolecular coordination solids BK Das, SJ Bora, M Chakrabortty, L Kalita, R Chakrabarty, R Barman Journal of Chemical Sciences 118, 487-494, 2006 | 68 | 2006 |
| Preparation of spherical ceria coated silica nanoparticle abrasives for CMP application L Peedikakkandy, L Kalita, P Kavle, A Kadam, V Gujar, M Arcot, ... Applied Surface Science 357, 1306-1312, 2015 | 40 | 2015 |
| Reactions of [(Me3Si) 3CAlMe2] with substituted benzoic acids. Isolation of a rare organoalumoxane carboxylate L Kalita, R Pothiraja, V Saraf, MG Walawalkar, RJ Butcher, R Murugavel Journal of Organometallic Chemistry 696 (20), 3155-3161, 2011 | 19 | 2011 |
| Synthesis and structural characterization of dinuclear complexes of trivalent aluminum, gallium, indium and chromium derived from pyrazole-2-ethanol L Kalita, MG Walawalkar, R Murugavel Inorganica Chimica Acta 377 (1), 105-110, 2011 | 17 | 2011 |
| Organotitanium phosphates with free P–OH groups: Synthesis, spectroscopy and solid state structures L Kalita, AC Kalita, R Murugavel Journal of Organometallic Chemistry 751, 555-562, 2014 | 12 | 2014 |
| Multi-layer plasma erosion protection for chamber components T Tran, L Kalita, TW Kim, D Lubomirsky, X Wu, XM He, CH Chou, JY Sun US Patent 10,755,900, 2020 | 10 | 2020 |
| Supramolecular aggregation in alkaline earth metal 3-and 4-hydroxybenzoates using 1, 10-phenanthroline auxiliary R Korah, L Kalita, R Murugavel NISCAIR-CSIR, India, 2011 | 10 | 2011 |
| Corrosion resistant ground shield of processing chamber D Lubomirsky, XM He, JY Sun, X Wu, L Kalita, S Park US Patent 11,562,890, 2023 | 6 | 2023 |
| Barrier anodization methods to develop aluminum oxide layer for plasma equipment components Y Pareek, A Kadam, L Kalita, B Thakur, D Lubomirsky US Patent App. 14/705,659, 2016 | 6 | 2016 |
| Methods, apparatus, and systems for processing a substrate J Soonwook, L Kalita, TS Cho, KD Schatz US Patent App. 16/460,277, 2021 | 4 | 2021 |
| Texturing and plating nickel on aluminum process chamber components L Kalita, S Park, D Lubomirsky US Patent App. 15/957,076, 2019 | 2 | 2019 |
| Semiconductor chamber components with high-performance coating L Kalita US Patent 11,515,195, 2022 | 1 | 2022 |
| Ceramic showerheads with conductive electrodes L Kalita, S Park, D Lubomirsky, TF Tan, LK Loh, S Singh, TW Kim US Patent 10,920,319, 2021 | 1 | 2021 |
| Ceramic showerheads with conductive electrodes L Kalita, S Park, D Lubomirsky, TF Tan, LK Loh, S Singh, TW Kim US Patent 11,834,744, 2023 | | 2023 |
| ADVANCED BARRIER NICKEL OXIDE (BNiO) COATING DEVELOPMENT FOR PROCESS CHAMBER COMPONENTS VIA OZONE TREATMENT L Kalita, J Behnke, D Knapp US Patent App. 17/692,351, 2023 | | 2023 |
| Semiconductor chamber components with multi-layer coating L Kalita, JF Behnke, DD Srikantaia, ST Nguyen US Patent App. 17/693,037, 2023 | | 2023 |
| Semiconductor processing chamber G Toland, KD Schatz, L Kalita, D Lubomirsky US Patent 11,715,625, 2023 | | 2023 |
| Corrosion resistant ground shield of processing chamber D Lubomirsky, XM He, JY Sun, X Wu, L Kalita, S Park US Patent App. 18/067,632, 2023 | | 2023 |
| Semiconductor chamber coatings and processes L Kalita, S Nguyen, D Lubomirsky, KD Schatz US Patent App. 18/080,884, 2023 | | 2023 |
