| Low-temperature, high-performance solution-processed metal oxide thin-film transistors formed by a ‘sol–gel on chip’process KK Banger, Y Yamashita, K Mori, RL Peterson, T Leedham, J Rickard, ... Nature Materials 10 (1), 45-50, 2010 | 1104 | 2010 |
| Harvesting traffic-induced vibrations for structural health monitoring of bridges TV Galchev, J McCullagh, RL Peterson, K Najafi Journal of Micromechanics and Microengineering 21 (10), 104005, 2011 | 183 | 2011 |
| Fused-Silica Micro Birdbath Resonator Gyroscope (micro-BRG) JY Cho, JK Woo, J Yan, RL Peterson, K Najafi Microelectromechanical Systems, Journal of 23 (1), 66-77, 2014 | 135* | 2014 |
| Thinned-PZT on SOI process and design optimization for piezoelectric inertial energy harvesting EE Aktakka, RL Peterson, K Najafi 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 129 | 2011 |
| Microsystems for energy harvesting K Najafi, T Galchev, EE Aktakka, RL Peterson, J McCullagh 2011 16th International Solid-State Sensors, Actuators and Microsystems …, 2011 | 97 | 2011 |
| High Performance, Low temperature Solution-Processed Barium and Strontium doped Oxide Thin Film Transistors KK Banger, RL Peterson, K Mori, Y Yamashita, T Leedham, H Sirringhaus Chemistry of Materials 26, 1195-1203, 2013 | 78 | 2013 |
| Long-term testing of a vibration harvesting system for the structural health monitoring of bridges JJ McCullagh, T Galchev, RL Peterson, R Gordenker, Y Zhang, J Lynch, ... Sensors and Actuators A: Physical 217, 139-150, 2014 | 77 | 2014 |
| 3-Dimensional Blow Torch-Molding of Fused Silica Microstructures JY Cho, J Yan, JA Gregory, HW Eberhart, RL Peterson, K Najafi IEEE Journal of Microelectromechanical Systems 22 (6), 1276-1284, 2013 | 76 | 2013 |
| High aspect ratio deep silicon etching KJ Owen, B VanDerElzen, RL Peterson, K Najafi Micro Electro Mechanical Systems (MEMS), 2012 IEEE 25th International …, 2012 | 76 | 2012 |
| Interfacial reactions of titanium/gold ohmic contacts with Sn-doped β-Ga₂O₃ MH Lee, RL Peterson APL Materials 7 (2), 022524, 2019 | 71 | 2019 |
| A CMOS-compatible piezoelectric vibration energy scavenger based on the integration of bulk PZT films on silicon EE Aktakka, RL Peterson, K Najafi Electron Devices Meeting (IEDM), 2010 IEEE International, 31.5.1-31.5.4, 2010 | 70 | 2010 |
| Monolithic integration of high-voltage thin-film electronics on low-voltage silicon integrated circuits using a solution process Y Son, B Frost, Y Zhao, RL Peterson Nature Electronics 2 (11), 540-548, 2019 | 68 | 2019 |
| A self-supplied inertial piezoelectric energy harvester with power-management IC EE Aktakka, RL Peterson, K Najafi 2011 IEEE International Solid-State Circuits Conference, 120-121, 2011 | 67 | 2011 |
| Low-temperature sintering of in-plane self-assembled ZnO nanorods for solution-processed high-performance thin film transistors B Sun, RL Peterson, H Sirringhaus, K Mori The Journal of Physical Chemistry C 111 (51), 18831-18835, 2007 | 67 | 2007 |
| Fully-depleted strained-Si on insulator NMOSFETs without relaxed SiGe buffers H Yin, KD Hobart, RL Peterson, FJ Kub, SR Shieh, TS Duffy, JC Sturm Electron Devices Meeting, 2003. IEDM'03 Technical Digest. IEEE International …, 2003 | 65 | 2003 |
| High-Q fused silica birdbath and hemispherical 3-D resonators made by blow torch molding J Cho, J Yan, JA Gregory, H Eberhart, RL Peterson, K Najafi Micro Electro Mechanical Systems (MEMS), 2013 IEEE 26th International …, 2013 | 61 | 2013 |
| Molybdenum as a contact material in zinc tin oxide thin film transistors W Hu, RL Peterson Applied Physics Letters 104 (19), 192105, 2014 | 60 | 2014 |
| Microsystem device and methods for fabricating the same K Najafi, RL Peterson, JY Cho, Z Cao, G He, J Gregory, Y Yuan US Patent 9,778,039, 2017 | 56 | 2017 |
| Microsystem Device and Methods for Fabricating the Same K Najafi, RL Peterson, JY Cho, Z Cao, G He, J Gregory, Y Yuan, ... US Patent 20,130,105,921, 2013 | 56* | 2013 |
| A CPW T-resonator technique for electrical characterization of microwave substrates RL Peterson, RF Drayton IEEE Microwave and Wireless Components Letters 12, 90, 2002 | 56 | 2002 |
Ethem Erkan AktakkaAssistant Research Scientist, University of MichiganVerified email at umich.edu
