Thermoelastic damping in MEMS gyroscopes at high frequencies D Schiwietz, EM Weig, P Degenfeld-Schonburg Microsystems & Nanoengineering 9 (1), 11, 2023 | 14 | 2023 |
Temperature dependence of quality factors at high frequencies in mems gyroscopes D Schiwietz, EM Weig, P Degenfeld-Schonburg 2023 IEEE 36th International Conference on Micro Electro Mechanical Systems …, 2023 | 4 | 2023 |
Shape Optimization of Eigenfrequencies in MEMS Gyroscopes D Schiwietz, M Hörsting, EM Weig, P Degenfeld-Schonburg, M Wenzel arXiv preprint arXiv:2402.05837, 2024 | 1 | 2024 |
Simulation of Anchor Loss in MEMS Resonators Using Perfectly Matched Layers D Schiwietz, LR More, EM Weig, P Degenfeld-Schonburg 2023 IEEE International Symposium on Inertial Sensors and Systems (INERTIAL …, 2023 | 1 | 2023 |
Shape Optimization of Geometrically Nonlinear Modal Coupling Coefficients: An Application to MEMS Gyroscopes D Schiwietz, M Hörsting, EM Weig, M Wenzel, P Degenfeld-Schonburg arXiv preprint arXiv:2403.17679, 2024 | | 2024 |